工作距离可达15mm
测量范围最大400um
|
探头型号 |
1502A24 |
1504A23 |
1505A20 |
1507A19 |
|
测量范围 [mm] |
±0.1 |
±0.2 |
±0.25 |
±0.35 |
|
工作距离 [mm] |
15.5 |
15.5 |
14 |
14 |
|
测量精度[um] |
±0.13 |
±0.25 |
±0.28 |
±0.36 |
|
可测倾角 [deg] |
±24º |
±23º |
±20º |
±19º |
|
最小光斑直径 [um] |
7 |
8 |
8 |
8 |
|
镜头重量 [g] |
106 |
125 |
||
|
镜头长度 [mm] |
89 |
127 |
||
|
镜头直径 [mm] |
24 |
24 |
||